Nanofabrication of reactive structure for low temperature bonding

Ikusei Rin, Jörg Bräuer, Lutz Hofmann, Mario Baum, Jörg Frömel, Maik Wiemer, Masayoshi Esashi, Thomas Gessner

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Microsystems that are used for medical application mostly consist of temperature sensible components. Therefore the temperatures during the fabrication process must be limited. This paper deals with the fabrication of reactive nanostructures that have the capability to be used as local heat source and thus can be used for processes during the fabrication of temperature sensible systems. Hereby, heat is produced during a self propagating exothermal reaction of two different materials that are present in a multilayered system of horizontal or vertical arranged material films in nanoscale dimensions. In this paper the principle of the self propagating reaction of those reactive systems as well as their fabrication is shown.

Original languageEnglish
Title of host publication2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009
Pages313-317
Number of pages5
DOIs
Publication statusPublished - 2009
Event2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009 - Tainan, Taiwan, Province of China
Duration: 2009 Oct 182009 Oct 21

Publication series

Name2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009

Other

Other2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009
CountryTaiwan, Province of China
CityTainan
Period09/10/1809/10/21

Keywords

  • Nanofabrication
  • Reactive multilayer
  • Self-propagating exothermic reactions
  • Silicon bonding

ASJC Scopus subject areas

  • Molecular Medicine
  • Pharmacology

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