Nanofabrication of magnetic tunnel junctions by using electron beam lithography

T. Niizeki; H. Kubota; Y. Ando; T. Miyazaki

doi:10.1016/j.jmmm.2003.12.387

Nanofabrication of magnetic tunnel junctions by using electron beam lithography

T. Niizeki, H. Kubota, Y. Ando, T. Miyazaki

ENG - Applied Physics

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Nanometer-sized ferromagnetic tunnel junctions (MTJs) are suitable to investigate the enhancement of tunnel magnetoresistive effect (TMR) by Coulomb blockade effect. A new fabrication process that enables us to shrink the size of MTJs down to the order of 10nm has been developed. MTJs structured by using this process exhibited large TMR ratio of 38%.

Original language	English
Pages (from-to)	1947-1948
Number of pages	2
Journal	Journal of Magnetism and Magnetic Materials
Volume	272-276
Issue number	III
DOIs	https://doi.org/10.1016/j.jmmm.2003.12.387
Publication status	Published - 2004 May

Keywords

Ferromagnetic tunnel junction
Single-electron tunneling
Tunnel magnetoresistance

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

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abstract = "Nanometer-sized ferromagnetic tunnel junctions (MTJs) are suitable to investigate the enhancement of tunnel magnetoresistive effect (TMR) by Coulomb blockade effect. A new fabrication process that enables us to shrink the size of MTJs down to the order of 10nm has been developed. MTJs structured by using this process exhibited large TMR ratio of 38%.",

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author = "T. Niizeki and H. Kubota and Y. Ando and T. Miyazaki",

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AU - Niizeki, T.

AU - Kubota, H.

AU - Ando, Y.

AU - Miyazaki, T.

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N2 - Nanometer-sized ferromagnetic tunnel junctions (MTJs) are suitable to investigate the enhancement of tunnel magnetoresistive effect (TMR) by Coulomb blockade effect. A new fabrication process that enables us to shrink the size of MTJs down to the order of 10nm has been developed. MTJs structured by using this process exhibited large TMR ratio of 38%.

AB - Nanometer-sized ferromagnetic tunnel junctions (MTJs) are suitable to investigate the enhancement of tunnel magnetoresistive effect (TMR) by Coulomb blockade effect. A new fabrication process that enables us to shrink the size of MTJs down to the order of 10nm has been developed. MTJs structured by using this process exhibited large TMR ratio of 38%.

KW - Ferromagnetic tunnel junction

KW - Single-electron tunneling

KW - Tunnel magnetoresistance

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JF - Journal of Magnetism and Magnetic Materials

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