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Nanocrystalline films of silicon carbonitride: Chemical composition and bonding and functional properties
N. I. Fainer, M. L. Kosinova, Yu M. Rumyantsev, E. A. Maximovskii, B. M. Ayupov, B. A. Kolesov, F. A. Kuznetsov, V. G. Kesler, Masami Terauchi, K. Shibata, F. Satoh, Z. X. Cao
Research output: Contribution to conference › Paper › peer-review
6
Citations
(Scopus)