Nanocrystalline films of silicon carbonitride: Chemical composition and bonding and functional properties

N. I. Fainer, M. L. Kosinova, Yu M. Rumyantsev, E. A. Maximovskii, B. M. Ayupov, B. A. Kolesov, F. A. Kuznetsov, V. G. Kesler, Masami Terauchi, K. Shibata, F. Satoh, Z. X. Cao

Research output: Contribution to conferencePaperpeer-review

6 Citations (Scopus)

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Engineering & Materials Science