Nanocrystalline hard silicon carbonitride films were synthesized by RPECVD using the gas mixture of hexamethyldisilazane with ammonia and helium within temperature range of 723-1073 K. IR and Raman spectroscopy, AES, XPS, ellipsometry, XRD using the synchrotron radiation, SEM, HREM, SAED, AFM, measurements of hardness by nanoindenter and spectrophotometry measurements were applied to study their physicochemical properties. The SiCxN y films exhibit high optical transmittance in the spectra range of 1200-2200 nm. Microhardness of these films increases from 18 to 28 GPa, while Young's modulus changes from 135.5 to 185.5 GPa with Si-C bonds content.
|Number of pages||8|
|Publication status||Published - 2005 Dec 1|
|Event||15th European Conference on Chemical Vapor Deposition, EUROCVD-15 - Bochum, Germany|
Duration: 2005 Sep 5 → 2005 Sep 9
|Other||15th European Conference on Chemical Vapor Deposition, EUROCVD-15|
|Period||05/9/5 → 05/9/9|
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