Nano-structure of YSZ films prepared by laser CVD

Teiichi Kimura, Rong Tu, Takashi Goto

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


Nano-structure of YSZ films prepared by laser CVD (LCVD) was studied using TEM and SEM. LCVD-YSZ films had columnar structure which varied depending on deposition rates. The columnar grains had a significant (200) orientation. Each column with a diameter of 2-5 μm was constructed from sub-columns with 300-500 nm. At low deposition rates around 50 μm/h (14 nm/s), the sub-columns were almost single crystalline and pores of 20 nm in diameter were formed at column boundaries. At high deposition rates around 450 μm/h (125 nm/s), the sub-columns were polycrystalline, and many nano-pores of 1-5 nm were formed in the grain. The thermal conductivity decreased with increasing deposition rates; and the lowest value of 0.7 W/mK was obtained at 450 μm/h.

Original languageEnglish
Pages (from-to)12-16
Number of pages5
JournalNippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals
Issue number1
Publication statusPublished - 2005 Jan


  • Coating
  • Columnar structure
  • Laser chemical vapor deposition
  • Nano-pore
  • Nano-structure
  • Thermal conductivity
  • Yttria-stabilized zirconia

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanics of Materials
  • Metals and Alloys
  • Materials Chemistry


Dive into the research topics of 'Nano-structure of YSZ films prepared by laser CVD'. Together they form a unique fingerprint.

Cite this