Nano-oxide fabrication on thin-films of 3d-metal compounds and alloys

H. Kuramochi, T. Tokizaki, T. Onuki, J. Okabayashi, M. Mizuguchi, F. Takano, H. Oshima, T. Manago, H. Akinaga, H. Yokoyama

Research output: Contribution to journalConference articlepeer-review

7 Citations (Scopus)

Abstract

Nanometer-scale structures were fabricated by anodic oxidation using scanning probe microscopes on thin-films of various 3d-metal compounds and alloys on GaAs, such as MnAs, MnSb, Cr2O3, CoCr and NiFe. Material variation advances the developments in nano-fabrication by scanning probe microscope. Comparing the oxidation conditions, new methodology for fabrication of nano-devices is explored.

Original languageEnglish
Pages (from-to)349-355
Number of pages7
JournalSurface Science
Volume566-568
Issue number1-3 PART 1
DOIs
Publication statusPublished - 2004 Sep 20
Externally publishedYes
EventProceedings of the 22nd European Conference on Surface Science - Prague, Czech Republic
Duration: 2003 Sep 72003 Sep 12

Keywords

  • Atomic force microscopy
  • Chromium
  • Magnetic films
  • Manganese
  • Metal-semiconductor magnetic thin film structures
  • Oxidation

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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