Nano-oxide fabrication on thin-films of 3d-metal compounds and alloys

H. Kuramochi; T. Tokizaki; T. Onuki; J. Okabayashi; M. Mizuguchi; F. Takano; H. Oshima; T. Manago; H. Akinaga; H. Yokoyama

doi:10.1016/j.susc.2004.05.067

Nano-oxide fabrication on thin-films of 3d-metal compounds and alloys

H. Kuramochi, T. Tokizaki, T. Onuki, J. Okabayashi, M. Mizuguchi, F. Takano, H. Oshima, T. Manago, H. Akinaga, H. Yokoyama

Research output: Contribution to journal › Conference article › peer-review

7 Citations (Scopus)

Abstract

Nanometer-scale structures were fabricated by anodic oxidation using scanning probe microscopes on thin-films of various 3d-metal compounds and alloys on GaAs, such as MnAs, MnSb, Cr₂O₃, CoCr and NiFe. Material variation advances the developments in nano-fabrication by scanning probe microscope. Comparing the oxidation conditions, new methodology for fabrication of nano-devices is explored.

Original language	English
Pages (from-to)	349-355
Number of pages	7
Journal	Surface Science
Volume	566-568
Issue number	1-3 PART 1
DOIs	https://doi.org/10.1016/j.susc.2004.05.067
Publication status	Published - 2004 Sep 20
Externally published	Yes
Event	Proceedings of the 22nd European Conference on Surface Science - Prague, Czech Republic Duration: 2003 Sep 7 → 2003 Sep 12

Keywords

Atomic force microscopy
Chromium
Magnetic films
Manganese
Metal-semiconductor magnetic thin film structures
Oxidation

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/j.susc.2004.05.067

Cite this

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title = "Nano-oxide fabrication on thin-films of 3d-metal compounds and alloys",

abstract = "Nanometer-scale structures were fabricated by anodic oxidation using scanning probe microscopes on thin-films of various 3d-metal compounds and alloys on GaAs, such as MnAs, MnSb, Cr2O3, CoCr and NiFe. Material variation advances the developments in nano-fabrication by scanning probe microscope. Comparing the oxidation conditions, new methodology for fabrication of nano-devices is explored.",

keywords = "Atomic force microscopy, Chromium, Magnetic films, Manganese, Metal-semiconductor magnetic thin film structures, Oxidation",

author = "H. Kuramochi and T. Tokizaki and T. Onuki and J. Okabayashi and M. Mizuguchi and F. Takano and H. Oshima and T. Manago and H. Akinaga and H. Yokoyama",

note = "Funding Information: The authors express our thanks to Dr. N. Sakai of AIST for useful discussions. This work was partly supported by NEDO under the Nano-technology Program and Nano-processing Partnership Program of MEXT, Japan.; Proceedings of the 22nd European Conference on Surface Science ; Conference date: 07-09-2003 Through 12-09-2003",

year = "2004",

month = sep,

day = "20",

doi = "10.1016/j.susc.2004.05.067",

language = "English",

volume = "566-568",

pages = "349--355",

journal = "Surface Science",

issn = "0039-6028",

publisher = "Elsevier",

number = "1-3 PART 1",

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TY - JOUR

T1 - Nano-oxide fabrication on thin-films of 3d-metal compounds and alloys

AU - Kuramochi, H.

AU - Tokizaki, T.

AU - Onuki, T.

AU - Okabayashi, J.

AU - Mizuguchi, M.

AU - Takano, F.

AU - Oshima, H.

AU - Manago, T.

AU - Akinaga, H.

AU - Yokoyama, H.

N1 - Funding Information: The authors express our thanks to Dr. N. Sakai of AIST for useful discussions. This work was partly supported by NEDO under the Nano-technology Program and Nano-processing Partnership Program of MEXT, Japan.

PY - 2004/9/20

Y1 - 2004/9/20

N2 - Nanometer-scale structures were fabricated by anodic oxidation using scanning probe microscopes on thin-films of various 3d-metal compounds and alloys on GaAs, such as MnAs, MnSb, Cr2O3, CoCr and NiFe. Material variation advances the developments in nano-fabrication by scanning probe microscope. Comparing the oxidation conditions, new methodology for fabrication of nano-devices is explored.

AB - Nanometer-scale structures were fabricated by anodic oxidation using scanning probe microscopes on thin-films of various 3d-metal compounds and alloys on GaAs, such as MnAs, MnSb, Cr2O3, CoCr and NiFe. Material variation advances the developments in nano-fabrication by scanning probe microscope. Comparing the oxidation conditions, new methodology for fabrication of nano-devices is explored.

KW - Atomic force microscopy

KW - Chromium

KW - Magnetic films

KW - Manganese

KW - Metal-semiconductor magnetic thin film structures

KW - Oxidation

UR - http://www.scopus.com/inward/record.url?scp=4544296369&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=4544296369&partnerID=8YFLogxK

U2 - 10.1016/j.susc.2004.05.067

DO - 10.1016/j.susc.2004.05.067

M3 - Conference article

AN - SCOPUS:4544296369

VL - 566-568

SP - 349

EP - 355

JO - Surface Science

JF - Surface Science

SN - 0039-6028

IS - 1-3 PART 1

T2 - Proceedings of the 22nd European Conference on Surface Science

Y2 - 7 September 2003 through 12 September 2003

ER -

Nano-oxide fabrication on thin-films of 3d-metal compounds and alloys

Abstract

Keywords

ASJC Scopus subject areas

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