Abstract
Nanometer-scale structures were fabricated by anodic oxidation using scanning probe microscopes on thin-films of various 3d-metal compounds and alloys on GaAs, such as MnAs, MnSb, Cr2O3, CoCr and NiFe. Material variation advances the developments in nano-fabrication by scanning probe microscope. Comparing the oxidation conditions, new methodology for fabrication of nano-devices is explored.
Original language | English |
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Pages (from-to) | 349-355 |
Number of pages | 7 |
Journal | Surface Science |
Volume | 566-568 |
Issue number | 1-3 PART 1 |
DOIs | |
Publication status | Published - 2004 Sep 20 |
Externally published | Yes |
Event | Proceedings of the 22nd European Conference on Surface Science - Prague, Czech Republic Duration: 2003 Sep 7 → 2003 Sep 12 |
Keywords
- Atomic force microscopy
- Chromium
- Magnetic films
- Manganese
- Metal-semiconductor magnetic thin film structures
- Oxidation
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry