Nano-indentation hardness and elastic moduli of bulk single-crystal AlN

Ichiro Yonenaga, Toshiyuki Shima, Marcel H.F. Sluiter

Research output: Contribution to journalArticlepeer-review

73 Citations (Scopus)


The hardness of 0.5-mm-thick single-crystal aluminum nitride (α-AlN) was measured by the nano-indentation method at room temperature. The hardness was 18 GPa while the bulk, Young's and shear moduli, were evaluated to be 220, 374 and 154 GPa, respectively.

Original languageEnglish
Pages (from-to)4620-4621
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number7 A
Publication statusPublished - 2002 Jul
Externally publishedYes


  • Aluminum nitride
  • Elastic moduli
  • Hardness
  • Nano-indentation

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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