Nano-fabrication with metallic glass - An exotic material for nano-electromechanical systems

Parmanand Sharma, Neelam Kaushik, Hisamichi Kimura, Yasunori Saotome, Akihisa Inoue

Research output: Contribution to journalArticlepeer-review

127 Citations (Scopus)

Abstract

Completely glassy thin films of Zr-Al-Cu-Ni exhibiting a large supercooled liquid region (ΔTx ≤ 95K), very smooth surface (R a ≤ 0.2nm) and high value of Vickers hardness (Hv ≤ 940) were deposited by sputtering. The micro/nano-patterning ability of these films is demonstrated by focused ion beam etching (smallest pattern ∼12nm), as well as by the imprint lithography technique (smallest feature ∼34nm). These glassy films having very good mechanical and chemical properties, combined with superb nano-patterning ability, integrateable with silicon integrated circuit technology, are promising for fabrication of a wide range of two-or three-dimensional components for future nano-electromechanical systems.

Original languageEnglish
Article number035302
JournalNanotechnology
Volume18
Issue number3
DOIs
Publication statusPublished - 2007 Jan 24

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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