Completely glassy thin films of Zr-Al-Cu-Ni exhibiting a large supercooled liquid region (ΔTx ≤ 95K), very smooth surface (R a ≤ 0.2nm) and high value of Vickers hardness (Hv ≤ 940) were deposited by sputtering. The micro/nano-patterning ability of these films is demonstrated by focused ion beam etching (smallest pattern ∼12nm), as well as by the imprint lithography technique (smallest feature ∼34nm). These glassy films having very good mechanical and chemical properties, combined with superb nano-patterning ability, integrateable with silicon integrated circuit technology, are promising for fabrication of a wide range of two-or three-dimensional components for future nano-electromechanical systems.
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering