Multislice imaging of integrated circuits by precession X-ray ptychography

Kei Shimomura, Makoto Hirose, Yukio Takahashi

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed. In this study, tilt-series ptychographic diffraction data sets of a two-layered circuit with a a1.4 μm gap at nine incident angles are collected in a wide Q range and then artifact-reduced phase images of each layer are successfully reconstructed at a10 nm resolution. The present method has great potential for the three-dimensional observation of flat specimens with thickness on the order of 100 μm, such as three-dimensional stacked integrated circuits based on through-silicon vias, without laborious sample preparation.A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed.

Original languageEnglish
Pages (from-to)66-70
Number of pages5
JournalActa Crystallographica Section A: Foundations and Advances
Volume74
Issue number1
DOIs
Publication statusPublished - 2018 Jan
Externally publishedYes

Keywords

  • X-ray ptychography
  • integrated circuits
  • multislice approach

ASJC Scopus subject areas

  • Structural Biology
  • Biochemistry
  • Materials Science(all)
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry
  • Inorganic Chemistry

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