Multislice imaging of integrated circuits by precession X-ray ptychography

Kei Shimomura; Makoto Hirose; Yukio Takahashi

doi:10.1107/S205327331701525X

Multislice imaging of integrated circuits by precession X-ray ptychography

Kei Shimomura, Makoto Hirose, Yukio Takahashi

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed. In this study, tilt-series ptychographic diffraction data sets of a two-layered circuit with a a1.4 μm gap at nine incident angles are collected in a wide Q range and then artifact-reduced phase images of each layer are successfully reconstructed at a10 nm resolution. The present method has great potential for the three-dimensional observation of flat specimens with thickness on the order of 100 μm, such as three-dimensional stacked integrated circuits based on through-silicon vias, without laborious sample preparation.A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed.

Original language	English
Pages (from-to)	66-70
Number of pages	5
Journal	Acta Crystallographica Section A: Foundations and Advances
Volume	74
Issue number	1
DOIs	https://doi.org/10.1107/S205327331701525X
Publication status	Published - 2018 Jan
Externally published	Yes

Keywords

X-ray ptychography
integrated circuits
multislice approach

ASJC Scopus subject areas

Structural Biology
Biochemistry
Materials Science(all)
Condensed Matter Physics
Physical and Theoretical Chemistry
Inorganic Chemistry

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10.1107/S205327331701525X

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@article{82c2af8cd6e04a72a4eb50495c705b48,

title = "Multislice imaging of integrated circuits by precession X-ray ptychography",

abstract = "A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed. In this study, tilt-series ptychographic diffraction data sets of a two-layered circuit with a a1.4 μm gap at nine incident angles are collected in a wide Q range and then artifact-reduced phase images of each layer are successfully reconstructed at a10 nm resolution. The present method has great potential for the three-dimensional observation of flat specimens with thickness on the order of 100 μm, such as three-dimensional stacked integrated circuits based on through-silicon vias, without laborious sample preparation.A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed.",

keywords = "X-ray ptychography, integrated circuits, multislice approach",

author = "Kei Shimomura and Makoto Hirose and Yukio Takahashi",

note = "Funding Information: Funding for this research was provided by: Ministry of Education, Culture, Sports, Science and Technology (grant No. 16 K13725; grant No. 16 H00889; scholarship No. 16 J00329; scholarship No. 17 J01673); Japan Science and Technology Agency. Publisher Copyright: {\textcopyright} 2018 International Union of Crystallography.",

year = "2018",

month = jan,

doi = "10.1107/S205327331701525X",

language = "English",

volume = "74",

pages = "66--70",

journal = "Acta Crystallographica Section A: Foundations and Advances",

issn = "0108-7673",

publisher = "John Wiley and Sons Inc.",

number = "1",

}

TY - JOUR

T1 - Multislice imaging of integrated circuits by precession X-ray ptychography

AU - Shimomura, Kei

AU - Hirose, Makoto

AU - Takahashi, Yukio

N1 - Funding Information: Funding for this research was provided by: Ministry of Education, Culture, Sports, Science and Technology (grant No. 16 K13725; grant No. 16 H00889; scholarship No. 16 J00329; scholarship No. 17 J01673); Japan Science and Technology Agency. Publisher Copyright: © 2018 International Union of Crystallography.

PY - 2018/1

Y1 - 2018/1

N2 - A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed. In this study, tilt-series ptychographic diffraction data sets of a two-layered circuit with a a1.4 μm gap at nine incident angles are collected in a wide Q range and then artifact-reduced phase images of each layer are successfully reconstructed at a10 nm resolution. The present method has great potential for the three-dimensional observation of flat specimens with thickness on the order of 100 μm, such as three-dimensional stacked integrated circuits based on through-silicon vias, without laborious sample preparation.A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed.

AB - A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed. In this study, tilt-series ptychographic diffraction data sets of a two-layered circuit with a a1.4 μm gap at nine incident angles are collected in a wide Q range and then artifact-reduced phase images of each layer are successfully reconstructed at a10 nm resolution. The present method has great potential for the three-dimensional observation of flat specimens with thickness on the order of 100 μm, such as three-dimensional stacked integrated circuits based on through-silicon vias, without laborious sample preparation.A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed.

KW - X-ray ptychography

KW - integrated circuits

KW - multislice approach

UR - http://www.scopus.com/inward/record.url?scp=85039041427&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85039041427&partnerID=8YFLogxK

U2 - 10.1107/S205327331701525X

DO - 10.1107/S205327331701525X

M3 - Article

C2 - 29269599

AN - SCOPUS:85039041427

VL - 74

SP - 66

EP - 70

JO - Acta Crystallographica Section A: Foundations and Advances

JF - Acta Crystallographica Section A: Foundations and Advances

SN - 0108-7673

IS - 1

ER -

Multislice imaging of integrated circuits by precession X-ray ptychography

Abstract

Keywords

ASJC Scopus subject areas

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