Multislice imaging of integrated circuits by precession X-ray ptychography

Kei Shimomura; Makoto Hirose; Yukio Takahashi

doi:10.1107/S205327331701525X

Multislice imaging of integrated circuits by precession X-ray ptychography

Kei Shimomura, Makoto Hirose, Yukio Takahashi

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed. In this study, tilt-series ptychographic diffraction data sets of a two-layered circuit with a a1.4 μm gap at nine incident angles are collected in a wide Q range and then artifact-reduced phase images of each layer are successfully reconstructed at a10 nm resolution. The present method has great potential for the three-dimensional observation of flat specimens with thickness on the order of 100 μm, such as three-dimensional stacked integrated circuits based on through-silicon vias, without laborious sample preparation.A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed.

Original language	English
Pages (from-to)	66-70
Number of pages	5
Journal	Acta Crystallographica Section A: Foundations and Advances
Volume	74
Issue number	1
DOIs	https://doi.org/10.1107/S205327331701525X
Publication status	Published - 2018 Jan
Externally published	Yes

Keywords

X-ray ptychography
integrated circuits
multislice approach

ASJC Scopus subject areas

Structural Biology
Biochemistry
Materials Science(all)
Condensed Matter Physics
Physical and Theoretical Chemistry
Inorganic Chemistry

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10.1107/S205327331701525X

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@article{82c2af8cd6e04a72a4eb50495c705b48,

title = "Multislice imaging of integrated circuits by precession X-ray ptychography",

abstract = "A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed. In this study, tilt-series ptychographic diffraction data sets of a two-layered circuit with a a1.4 μm gap at nine incident angles are collected in a wide Q range and then artifact-reduced phase images of each layer are successfully reconstructed at a10 nm resolution. The present method has great potential for the three-dimensional observation of flat specimens with thickness on the order of 100 μm, such as three-dimensional stacked integrated circuits based on through-silicon vias, without laborious sample preparation.A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed.",

keywords = "X-ray ptychography, integrated circuits, multislice approach",

author = "Kei Shimomura and Makoto Hirose and Yukio Takahashi",

note = "Funding Information: This work was supported by the SENTAN Project of JST. We thank T. Ishikawa and K. Yamauchi for many stimulating discussions, as well as Y. Kohmura for help in the experimental setup. Funding Information: Funding for this research was provided by: Ministry of Education, Culture, Sports, Science and Technology (grant No. 16 K13725; grant No. 16 H00889; scholarship No. 16 J00329; scholarship No. 17 J01673); Japan Science and Technology Agency. Publisher Copyright: {\textcopyright} 2018 International Union of Crystallography.",

year = "2018",

month = jan,

doi = "10.1107/S205327331701525X",

language = "English",

volume = "74",

pages = "66--70",

journal = "Acta Crystallographica Section A: Foundations and Advances",

issn = "0108-7673",

publisher = "John Wiley and Sons Inc.",

number = "1",

}

TY - JOUR

T1 - Multislice imaging of integrated circuits by precession X-ray ptychography

AU - Shimomura, Kei

AU - Hirose, Makoto

AU - Takahashi, Yukio

N1 - Funding Information: This work was supported by the SENTAN Project of JST. We thank T. Ishikawa and K. Yamauchi for many stimulating discussions, as well as Y. Kohmura for help in the experimental setup. Funding Information: Funding for this research was provided by: Ministry of Education, Culture, Sports, Science and Technology (grant No. 16 K13725; grant No. 16 H00889; scholarship No. 16 J00329; scholarship No. 17 J01673); Japan Science and Technology Agency. Publisher Copyright: © 2018 International Union of Crystallography.

PY - 2018/1

Y1 - 2018/1

N2 - A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed. In this study, tilt-series ptychographic diffraction data sets of a two-layered circuit with a a1.4 μm gap at nine incident angles are collected in a wide Q range and then artifact-reduced phase images of each layer are successfully reconstructed at a10 nm resolution. The present method has great potential for the three-dimensional observation of flat specimens with thickness on the order of 100 μm, such as three-dimensional stacked integrated circuits based on through-silicon vias, without laborious sample preparation.A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed.

AB - A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed. In this study, tilt-series ptychographic diffraction data sets of a two-layered circuit with a a1.4 μm gap at nine incident angles are collected in a wide Q range and then artifact-reduced phase images of each layer are successfully reconstructed at a10 nm resolution. The present method has great potential for the three-dimensional observation of flat specimens with thickness on the order of 100 μm, such as three-dimensional stacked integrated circuits based on through-silicon vias, without laborious sample preparation.A method for nondestructively visualizing multisection nanostructures of integrated circuits by X-ray ptychography with a multislice approach is proposed.

KW - X-ray ptychography

KW - integrated circuits

KW - multislice approach

UR - http://www.scopus.com/inward/record.url?scp=85039041427&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85039041427&partnerID=8YFLogxK

U2 - 10.1107/S205327331701525X

DO - 10.1107/S205327331701525X

M3 - Article

C2 - 29269599

AN - SCOPUS:85039041427

VL - 74

SP - 66

EP - 70

JO - Acta Crystallographica Section A: Foundations and Advances

JF - Acta Crystallographica Section A: Foundations and Advances

SN - 0108-7673

IS - 1

ER -

Multislice imaging of integrated circuits by precession X-ray ptychography

Abstract

Keywords

ASJC Scopus subject areas

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