Multiscale element mapping of buried structures by ptychographic x-ray diffraction microscopy using anomalous scattering

Yukio Takahashi, Akihiro Suzuki, Nobuyuki Zettsu, Yoshiki Kohmura, Kazuto Yamauchi, Tetsuya Ishikawa

Research output: Contribution to journalArticlepeer-review

23 Citations (Scopus)

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Physics & Astronomy