Multilayer coated grazing incidence condenser for large numerical aperture objective at wavelength of 4.5 nm

T. Ejima, T. Hatano, K. Ohno, T. Fukayama, S. Aihara, M. Yanagihara, T. Tsuru

    Research output: Contribution to journal › Article › peer-review

    2 Citations (Scopus)

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