Multilayer coated grazing incidence condenser for large numerical aperture objective at wavelength of 4.5 nm

T. Ejima, T. Hatano, K. Ohno, T. Fukayama, S. Aihara, M. Yanagihara, T. Tsuru

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

A grazing incidence condenser is developed for objectives with large numerical aperture working in Carbon-window wavelength region (λ = 4.4-5.0 nm) with the use of a point light source. The condenser is composed of four pieces of toroidal mirrors and a piece of the mirror was fabricated to evaluate the performance of the mirror. The radii of the toroidal mirror are determined by ray-trace calculation, and each radius of the mirror substrate and the roughness of the polished surface were evaluated to satisfy the designed parameter. A Co/C reflection multilayer is also designed to reflect soft x-ray light at 4.5 nm wavelength, and the reflection multilayer was deposited on the mirror surface. Measured reflectance of the toroidal mirror with the reflection multilayer is higher than 0.32 at 4.5 nm wavelength.

Original languageEnglish
Pages (from-to)6846-6852
Number of pages7
JournalApplied optics
Volume53
Issue number29
DOIs
Publication statusPublished - 2014 Oct 10

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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