Multi-sensor platform LSI enabling different sensors to be event-driven and connected to common differental bus line

Masanori Muroyama, Takahiro Nakayama, Yoshiyuki Hata, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper presents a multi-sensor platform LSI for versatile applications including next generation robots. For a unified system implementation, the proposed LSI, which was fabricated by TSMC0.13μm CMOS process and whose size is 2.83mm × 2.83mm, provides the following functions: several principle sensor readout circuits, 8-single or 4-differential multi-channels for multi-axis sensing, digital outputs as a haptic driver controller, flexible system parameter configuration, a RS485 compatible differential signal serial bus communication method, and event-driven response. This LSI has unique structures for MEMS-CMOS chip scale integration. We proved the sensor platform functions with experiments.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1156-1159
Number of pages4
ISBN (Electronic)9781538627310
DOIs
Publication statusPublished - 2017 Jul 26
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 2017 Jun 182017 Jun 22

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

Keywords

  • Event-driven response
  • MEMS-CMOS integration
  • Multi-kind sensing
  • Sensor platform LSI
  • Serial bus communication
  • Tactile sensor

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

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  • Cite this

    Muroyama, M., Nakayama, T., Hata, Y., & Tanaka, S. (2017). Multi-sensor platform LSI enabling different sensors to be event-driven and connected to common differental bus line. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1156-1159). [7994258] (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994258