Multi-probe with metallic tips for ferroelectric recording probe storage

Hirokazu Takahashi, Yasuhiro Mimura, Shuntaro Mori, Masahiro Ishimori, Atsushi Onoe, Takahito Ono, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper reports on the development and evaluation of various multi-probes consisted of silicon cantilevers with different types of tips made of platinum, ruthenium, chromium and diamond for probe-based ultra-high-density ferroelectric data storages beyond 1 Tbit/inch2. The metal probes can write and read the data bits on a medium with contact operation. We performed wear tests on the various tips of probe against a ferroelectric medium. Obvious wear of the tips cannot be observed except for the platinum-tip. Spontaneously polarized domain distribution of LiTaO3 was measured by means of scanning nonlinear dielectric microscopy using ruthenium tip probe.

Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages2509-2512
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 2007 Jun 102007 Jun 14

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period07/6/1007/6/14

Keywords

  • Diamond
  • Ferroelectric
  • Metal
  • Probe
  • SNDM
  • Storage
  • Wear

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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