TY - GEN
T1 - Multi-functional surface acoustic wave sensor for monitoring environmental and structural condition
AU - Furuya, Y.
AU - Kon, T.
AU - Okazaki, T.
AU - Saigusa, Y.
AU - Nomura, T.
PY - 2006/7/20
Y1 - 2006/7/20
N2 - As a first step to develop a health monitoring system with active and embedded nondestructive evaluation devices for the machineries and structures, multi-functional SAW (surface acoustic wave) device was developed. A piezoelectric LiNbO3(x-y cut) materials were used as a SAW substrate on which IDT(20μm pitch) was produced by lithography. On the surface of a path of SAW between IDTs, environmentally active material films of shape memory Ti50Ni41Cu(at%) with non-linear hysteresis and superelastic Ti48Ni43Cu(at%) with linear deformation behavior were formed by magnetron-sputtering technique. In this study, these two kinds of shape memory alloys(SMA) system were used to measure 1) loading level, 2) phase transformation and 3)stress-strain hysteresis under cyclic loading by utilizing their linearity and non-linearity deformation behaviors. Temperature and stress dependencies of SAW signal were also investigated in the non-sputtered film state. Signal amplitude and phase change of SAW were chosen to measure as the sensing parameters. As a result, temperature, stress level, phase transformation in SMA depending on temperature and mechanical damage accumulation could be measured by the proposed multi-functional SAW sensor. Moreover, the wireless SAW sensing system which has a unique feature of no supplying electric battery was constructed, and the same characteristic evaluation is confirmed in comparison with wired case..
AB - As a first step to develop a health monitoring system with active and embedded nondestructive evaluation devices for the machineries and structures, multi-functional SAW (surface acoustic wave) device was developed. A piezoelectric LiNbO3(x-y cut) materials were used as a SAW substrate on which IDT(20μm pitch) was produced by lithography. On the surface of a path of SAW between IDTs, environmentally active material films of shape memory Ti50Ni41Cu(at%) with non-linear hysteresis and superelastic Ti48Ni43Cu(at%) with linear deformation behavior were formed by magnetron-sputtering technique. In this study, these two kinds of shape memory alloys(SMA) system were used to measure 1) loading level, 2) phase transformation and 3)stress-strain hysteresis under cyclic loading by utilizing their linearity and non-linearity deformation behaviors. Temperature and stress dependencies of SAW signal were also investigated in the non-sputtered film state. Signal amplitude and phase change of SAW were chosen to measure as the sensing parameters. As a result, temperature, stress level, phase transformation in SMA depending on temperature and mechanical damage accumulation could be measured by the proposed multi-functional SAW sensor. Moreover, the wireless SAW sensing system which has a unique feature of no supplying electric battery was constructed, and the same characteristic evaluation is confirmed in comparison with wired case..
KW - A shape memory alloy
KW - Damage detection
KW - Load history
KW - Multi-functional device
KW - SAW(surface acoustic wave)
KW - SHM(structural health monitoring)
KW - Sensing technology
KW - Wireless sensor
UR - http://www.scopus.com/inward/record.url?scp=33745932937&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33745932937&partnerID=8YFLogxK
U2 - 10.1117/12.659536
DO - 10.1117/12.659536
M3 - Conference contribution
AN - SCOPUS:33745932937
SN - 081946225X
SN - 9780819462251
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Smart Structures and Materials 2006 - Smart Electronics, MEMS, BioMEMS, and Nanotechnology
T2 - Smart Structures and Materials 2006 - Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Y2 - 27 February 2006 through 1 March 2006
ER -