Multi-functional surface acoustic wave sensor for monitoring environmental and structural condition

Y. Furuya, T. Kon, T. Okazaki, Y. Saigusa, T. Nomura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

As a first step to develop a health monitoring system with active and embedded nondestructive evaluation devices for the machineries and structures, multi-functional SAW (surface acoustic wave) device was developed. A piezoelectric LiNbO3(x-y cut) materials were used as a SAW substrate on which IDT(20μm pitch) was produced by lithography. On the surface of a path of SAW between IDTs, environmentally active material films of shape memory Ti50Ni41Cu(at%) with non-linear hysteresis and superelastic Ti48Ni43Cu(at%) with linear deformation behavior were formed by magnetron-sputtering technique. In this study, these two kinds of shape memory alloys(SMA) system were used to measure 1) loading level, 2) phase transformation and 3)stress-strain hysteresis under cyclic loading by utilizing their linearity and non-linearity deformation behaviors. Temperature and stress dependencies of SAW signal were also investigated in the non-sputtered film state. Signal amplitude and phase change of SAW were chosen to measure as the sensing parameters. As a result, temperature, stress level, phase transformation in SMA depending on temperature and mechanical damage accumulation could be measured by the proposed multi-functional SAW sensor. Moreover, the wireless SAW sensing system which has a unique feature of no supplying electric battery was constructed, and the same characteristic evaluation is confirmed in comparison with wired case..

Original languageEnglish
Title of host publicationSmart Structures and Materials 2006 - Smart Electronics, MEMS, BioMEMS, and Nanotechnology
DOIs
Publication statusPublished - 2006 Jul 20
Externally publishedYes
EventSmart Structures and Materials 2006 - Smart Electronics, MEMS, BioMEMS, and Nanotechnology - San Diego, CA, United States
Duration: 2006 Feb 272006 Mar 1

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6172
ISSN (Print)0277-786X

Other

OtherSmart Structures and Materials 2006 - Smart Electronics, MEMS, BioMEMS, and Nanotechnology
CountryUnited States
CitySan Diego, CA
Period06/2/2706/3/1

Keywords

  • A shape memory alloy
  • Damage detection
  • Load history
  • Multi-functional device
  • SAW(surface acoustic wave)
  • SHM(structural health monitoring)
  • Sensing technology
  • Wireless sensor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Furuya, Y., Kon, T., Okazaki, T., Saigusa, Y., & Nomura, T. (2006). Multi-functional surface acoustic wave sensor for monitoring environmental and structural condition. In Smart Structures and Materials 2006 - Smart Electronics, MEMS, BioMEMS, and Nanotechnology [61720Q] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6172). https://doi.org/10.1117/12.659536