Multi-axis grating encoders for stage motion measurement

Woo Jae Kim, Akihide Kimura, Koji Hosono, Yuki Shimizu, Wei Gao

Research output: Contribution to journalReview articlepeer-review

1 Citation (Scopus)

Abstract

This paper describes an overview of the multi-axis grating encoders developed for measurement of stage motions. Two grating mirrors are employed in the grating encoders. One of the grating mirrors is utilised as the scale grating. The other grating mirror is included in the sensor head as the reference grating. The ±1st order diffracted beams from the two grating mirrors are superimposed to generate interference signals, which have information about not only the Z-directional out-of-plane displacement but also X- or Y-directional in-plane displacement. A prototype two-axis linear grating encoder with a software compensation technique for X- and Z-directional measurement, and a prototype three-axis surface grating encoder with a double Y-PD unit design for X-, Y- and Z-directional measurement are then presented.

Original languageEnglish
Pages (from-to)409-426
Number of pages18
JournalInternational Journal of Nanomanufacturing
Volume7
Issue number5-6
DOIs
Publication statusPublished - 2011 Nov

Keywords

  • Dimensional metrology
  • Grating encoder
  • Linear encoder
  • Multi-axis displacement
  • Optical sensor
  • Surface encoder

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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