Multi-axis angle sensor based on laser autocollimation

Yusuke Saito, Yoshikazu Arai, I Ko

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes two types of sensitive angle sensors based on laser autocollimation for dynamic measurement such as angular error motions of an ultraprecision stage. The first part of this paper describes a two-axis micro angle sensor with a single lens design for reduction of the sensor size. The sensor is then improved from two-axis detection to three-axis detection. The three-axis angle sensor employs a diffractive grating as the target mirror. The three-axis angles can be obtained simultaneously by detecting the linear displacements of the 0th-order and the ±1storder diffracted beams from the target. Optical design and performance of the two sensors are also presented.

Original languageEnglish
Title of host publicationProceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
EditorsHendrik Van Brussel, H. Spaan, E. Brinksmeier, T. Burke
Publishereuspen
Pages333-337
Number of pages5
ISBN (Electronic)9780955308253
Publication statusPublished - 2008 Jan 1
Event10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008 - Zurich, Switzerland
Duration: 2008 May 182008 May 22

Publication series

NameProceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
Volume1

Other

Other10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
CountrySwitzerland
CityZurich
Period08/5/1808/5/22

ASJC Scopus subject areas

  • Instrumentation
  • Mechanical Engineering
  • Materials Science(all)
  • Environmental Engineering
  • Industrial and Manufacturing Engineering

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