Moving tunable filters forward

Ken Ya Hashimoto; Tetsuya Kimura; Takeshi Matsumura; Hideki Hirano; Michio Kadota; Masayoshi Esashi; Shuji Tanaka

doi:10.1109/MMM.2015.2431237

Moving tunable filters forward

Ken Ya Hashimoto, Tetsuya Kimura, Takeshi Matsumura, Hideki Hirano, Michio Kadota, Masayoshi Esashi, Shuji Tanaka

Micro System Integration Center (μSIC)

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

This article discusses the possibility of tunable RF surface-acoustic-wave (SAW) and bulkacoustic-wave (BAW) filters using varactors (VCs) integrated by the skillful use of micro-electromechanical system (MEMS) technologies. First, the reasons that RF tunable filters are in demand for current wireless communications are explored, and various RF tunable filters are surveyed and compared. Next comes a discussion of tunable RF SAW/BAW filters combined with MEMS technologies, showing that high performance can be expected, provided that some key technologies are developed. Finally, the article introduces tunable SAW filters, which the authors developed in a research project called «heterointegration» to demonstrate what is possible by combining MEMS technologies with RF SAW/BAW technologies.

Original language	English
Article number	7153063
Pages (from-to)	89-97
Number of pages	9
Journal	IEEE Microwave Magazine
Volume	16
Issue number	7
DOIs	https://doi.org/10.1109/MMM.2015.2431237
Publication status	Published - 2015 Aug 1

ASJC Scopus subject areas

Radiation
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1109/MMM.2015.2431237

Cite this

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title = "Moving tunable filters forward",

abstract = "This article discusses the possibility of tunable RF surface-acoustic-wave (SAW) and bulkacoustic-wave (BAW) filters using varactors (VCs) integrated by the skillful use of micro-electromechanical system (MEMS) technologies. First, the reasons that RF tunable filters are in demand for current wireless communications are explored, and various RF tunable filters are surveyed and compared. Next comes a discussion of tunable RF SAW/BAW filters combined with MEMS technologies, showing that high performance can be expected, provided that some key technologies are developed. Finally, the article introduces tunable SAW filters, which the authors developed in a research project called «heterointegration» to demonstrate what is possible by combining MEMS technologies with RF SAW/BAW technologies.",

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AU - Matsumura, Takeshi

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AU - Esashi, Masayoshi

AU - Tanaka, Shuji

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Moving tunable filters forward

Abstract

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