TY - JOUR
T1 - Moving tunable filters forward
AU - Hashimoto, Ken Ya
AU - Kimura, Tetsuya
AU - Matsumura, Takeshi
AU - Hirano, Hideki
AU - Kadota, Michio
AU - Esashi, Masayoshi
AU - Tanaka, Shuji
N1 - Publisher Copyright:
© 2000-2012 IEEE.
PY - 2015/8/1
Y1 - 2015/8/1
N2 - This article discusses the possibility of tunable RF surface-acoustic-wave (SAW) and bulkacoustic-wave (BAW) filters using varactors (VCs) integrated by the skillful use of micro-electromechanical system (MEMS) technologies. First, the reasons that RF tunable filters are in demand for current wireless communications are explored, and various RF tunable filters are surveyed and compared. Next comes a discussion of tunable RF SAW/BAW filters combined with MEMS technologies, showing that high performance can be expected, provided that some key technologies are developed. Finally, the article introduces tunable SAW filters, which the authors developed in a research project called «heterointegration» to demonstrate what is possible by combining MEMS technologies with RF SAW/BAW technologies.
AB - This article discusses the possibility of tunable RF surface-acoustic-wave (SAW) and bulkacoustic-wave (BAW) filters using varactors (VCs) integrated by the skillful use of micro-electromechanical system (MEMS) technologies. First, the reasons that RF tunable filters are in demand for current wireless communications are explored, and various RF tunable filters are surveyed and compared. Next comes a discussion of tunable RF SAW/BAW filters combined with MEMS technologies, showing that high performance can be expected, provided that some key technologies are developed. Finally, the article introduces tunable SAW filters, which the authors developed in a research project called «heterointegration» to demonstrate what is possible by combining MEMS technologies with RF SAW/BAW technologies.
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U2 - 10.1109/MMM.2015.2431237
DO - 10.1109/MMM.2015.2431237
M3 - Article
AN - SCOPUS:84942616512
VL - 16
SP - 89
EP - 97
JO - IEEE Microwave Magazine
JF - IEEE Microwave Magazine
SN - 1527-3342
IS - 7
M1 - 7153063
ER -