Movable guided-mode resonant grating filters by four bimorph actuators for wavelength selective dynamic reflection control

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We fabricate a wavelength selective variable reflection filter driven by four bimorph actuators, which can control positions of the filter anywhere within an air gap. As the filter, a two-dimensional doubly periodic guided-mode resonant grating (GMRG) filter is employed for the first time. Two-dimensional GMRG filters are independent of polarization direction of an incident light, which are strongly desired in optical communications system. In the fabrication, electron beam lithography is used for patterning and fast atom beam etching and vaporized HF etching are carried out to form self-sustained structures. The device was fabricated successfully. The peak reflectivity of 82.8 % was obtained at a wavelength of 1508.75 nm, and the response time of approximately 50 msec was measured.

Original languageEnglish
Title of host publicationIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Pages68-69
Number of pages2
Publication statusPublished - 2006 Dec 1
EventIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States
Duration: 2006 Aug 212006 Aug 24

Publication series

NameIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Other

OtherIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
CountryUnited States
CityBig Sky, MT
Period06/8/2106/8/24

Keywords

  • Bimorph actuator
  • Guided-mode resonant grating filter
  • Silicon-on-insulator
  • Wavelength selective filter

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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