Motion nonlinearity of gimbaled micromirror in omnidirectional scanning for LiDAR application∗

Katsuya Suzuki, Takashi Sasaki, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Gimbaled MEMS mirror for omnidirectional LiDAR often suffers strong nonlinearity. The motion equations of the mirror are derived analytically. The motion nonlinearity is explained from the interaction between the motions on two axes. Moreover, a structural condition for stable mirror operation is found from the equations. In order to investigate basic characteristics of omnidirectional scanning, a gimbaled micromirror is fabricated by silicon SOI micromachining and tested.

Original languageEnglish
Title of host publication15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages130-133
Number of pages4
ISBN (Electronic)9781728172309
DOIs
Publication statusPublished - 2020 Sep 27
Event15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020 - Virtual, San Diego, United States
Duration: 2020 Sep 272020 Sep 30

Publication series

Name15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020

Conference

Conference15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020
CountryUnited States
CityVirtual, San Diego
Period20/9/2720/9/30

ASJC Scopus subject areas

  • Biotechnology
  • Molecular Biology
  • Electrochemistry
  • Biomedical Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

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