Mo/Si and MoSi2/Si nanostructures for multilayer Laue lens

H. Takenaka, S. Ichimaru, T. Ohchi, T. Koyama, T. Tsuji, H. Takano, Y. Kagoshima

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


To develop a multilayer Laue lens (MLL), we fabricated depth-graded Mo/Si and MoSi2/Si multilayers with each boundary according to the Fresnel zone configuration. The multilayers were deposited by magnetron sputtering. From the result of SEM image analysis of the multilayer cross sections, MoSi 2/Si multilayer had smaller layer-thickness errors than Mo/Si multilayer. In addition, from the result of the focusing test by using 20-keV X-rays, the measured beam size of MoSi2/Si MLL had a small blurring from the diffraction limited beam size. These results suggest that MoSi 2/Si multilayer is better suited than Mo/Si multilayer for use as an MLL in hard X-ray nanofocusing.

Original languageEnglish
Article number012074
JournalJournal of Physics: Conference Series
Publication statusPublished - 2009
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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