Morphology and atomic structure of hydrogen-terminated Si(110)-(1 × 1) surfaces prepared by a wet chemical process

Stephane Yu Matsushita, Erina Kawamoto, Kenya Haga, Taro Yamada, Shozo Suto

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We have measured the macroscopic andmicroscopic surface morphology of hydrogen-terminated Si(110)-(1 × 1) [H:Si(110)-(1 × 1)] surfaces prepared by an improved wet chemical process. The observations were performed by high-resolution electron-energy-loss spectroscopy (HREELS), low-energy-electron diffraction LEED), and scanning tunneling microscopy (STM). At macroscopic scale, it was found that the surface is a mono-hydride terminated surface with a two-dimensional p2mg space group, thus, being a well-defined H:Si(110)-(1 × 1) surface. At microscopic scale, elongated terraces were observed along the [11¯0] direction reflecting surface anisotropy. The terraces extend in frames with sizes up to a few micrometers. We discussed the macroscopic and microscopic surface morphology by combining our LEED and STM results.

Original languageEnglish
Pages (from-to)135-141
Number of pages7
JournalSurface Science
Volume632
DOIs
Publication statusPublished - 2015 Feb

Keywords

  • Anisotropy
  • Etching
  • HREELS
  • LEED
  • STM
  • Si(110)

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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