Abstract
Good-quality polycrystalline Ba0.7 Sr0.3 Ti O3 (BST0.7) thin films were deposited on fused silica substrates and Si substrates having a thick amorphous Si O2 layer at a relatively low temperature of 550 °C by spin-coating metal organic solutions. The thin films were highly transparent to light in the ultraviolet to near-infrared wavelength regions. The optical propagation loss for a 5-μm -wide and 300-nm -thick polycrystalline waveguide based on BST0.7 was about 17 dBcm at a wavelength of 632.8 nm. An electro-optic Mach-Zehnder interferometer modulator based on the polycrystalline BST0.7 thin film was monolithically integrated on a Si substrate with standard lithography and wet etching. Optical modulation was successfully demonstrated. The estimated electro-optic coefficient (6.7 pmV) is the highest reported so far for this kind of film deposited on a fused silica substrate or a Si substrate with an amorphous Si O2 layer.
Original language | English |
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Article number | 161107 |
Journal | Applied Physics Letters |
Volume | 88 |
Issue number | 16 |
DOIs | |
Publication status | Published - 2006 Apr 17 |
Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)