Monolithic PZT microstage with multi degrees of freedom for high-precision positioning

H. G. Xu, K. Okamoto, D. Y. Zhang, Takahito Ono, Masayoshi Esashi

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

This paper presents the fabrication and characterizations of a PZT actuated monolithic microstage with multi degrees of freedom (DOFs) used for high-precision positioning. The entire device is fabricated in a symmetrically arrangement from a PZT plate with a size of 15×15×0.8 mm 3. Four actuation units with a displacement amplification mechanism are integrated in the structure. They can be driven individually which result in movements of a stage in different directions. The performances of the displacement and the resonant frequencies are simulated using a finite element method (FEM). Simulation results show the possibility of achieving a displacement of 8 μm in x- and y-axes and 10 μm in z-axis under the applied voltage of 100 V. A prototype has been fabricated and evaluated. Comparisons between FEM simulation and experimental results are carried out.

Original languageEnglish
Article number603205
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume6032
DOIs
Publication statusPublished - 2006 Mar 30
EventICO20: MEMS, MOEMS, and NEMS - Changchun, China
Duration: 2005 Aug 212005 Aug 26

Keywords

  • Microstage
  • Monolithic
  • Multi dofs
  • PZT
  • Precision positioning

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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