Monolithic phase shifter based on mechanically tunable SAW delay line

J. H. Kuypers, M. E. Schmidt, Shuji Tanaka, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

This paper presents results of mechanically controlling the phase velocity of surface acoustic waves (SAW) and the application to monolithic phase shifters operating at 0.1∼10 GHz. A phase sensitivity of 2°/V and sensitivity of the phase velocity (Δv/v) of 41×10-6/V have been measured for devices operating at 2.45 GHz. This is 2 orders of magnitude larger than existing SAW-based monolithic phase shifters. The acoustic wavelength being 10.000 times smaller than the free space equivalent together with the large sensitivity lead to a 50∼500 times reduced device area compared to existing phase shifters.

Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages161-164
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 2007 Jun 102007 Jun 14

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period07/6/1007/6/14

Keywords

  • Acoustic RF MEMS
  • Delay line
  • Electrostatic tuning
  • Phase shifter

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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