Monolithic fabrication of GaN/Si structure for optical MEMS

R. Ito; F. R. Hu; M. Wakui; K. Hane

Monolithic fabrication of GaN/Si structure for optical MEMS

R. Ito, F. R. Hu, M. Wakui, K. Hane

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A new light source with a light beam steering mechanism is proposed for Optical MEMS. The propose device is composed of GaN light source and a movable stage. The direction of the light beam emitted from the GaN light source can be changed by the stage with the comb drive actuators. We deposited the GaN films on Si substrate by molecular beam epitaxy (MBE) and fabricated a movable stage by Si micromachining. The displacement of the Si stage was measured to be 50 um at the voltage of 100V and photoluminescence (PL) from the GaN light source was observed while moving the stage.

Original language	English
Title of host publication	Society for Information Display - 14th International Display Workshops, IDW '07
Pages	2006-2008
Number of pages	3
Publication status	Published - 2007 Dec 1
Event	14th International Display Workshops, IDW '07 - Sapporo, Japan Duration: 2007 Dec 5 → 2007 Dec 5

Publication series

Name	IDW '07 - Proceedings of the 14th International Display Workshops
Volume	4

Other

Other	14th International Display Workshops, IDW '07
Country	Japan
City	Sapporo
Period	07/12/5 → 07/12/5

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Radiology Nuclear Medicine and imaging
Atomic and Molecular Physics, and Optics

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title = "Monolithic fabrication of GaN/Si structure for optical MEMS",

abstract = "A new light source with a light beam steering mechanism is proposed for Optical MEMS. The propose device is composed of GaN light source and a movable stage. The direction of the light beam emitted from the GaN light source can be changed by the stage with the comb drive actuators. We deposited the GaN films on Si substrate by molecular beam epitaxy (MBE) and fabricated a movable stage by Si micromachining. The displacement of the Si stage was measured to be 50 um at the voltage of 100V and photoluminescence (PL) from the GaN light source was observed while moving the stage.",

author = "R. Ito and Hu, {F. R.} and M. Wakui and K. Hane",

year = "2007",

month = dec,

day = "1",

language = "English",

isbn = "9781605603919",

series = "IDW '07 - Proceedings of the 14th International Display Workshops",

pages = "2006--2008",

booktitle = "Society for Information Display - 14th International Display Workshops, IDW '07",

note = "14th International Display Workshops, IDW '07 ; Conference date: 05-12-2007 Through 05-12-2007",

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TY - GEN

T1 - Monolithic fabrication of GaN/Si structure for optical MEMS

AU - Ito, R.

AU - Hu, F. R.

AU - Wakui, M.

AU - Hane, K.

PY - 2007/12/1

Y1 - 2007/12/1

N2 - A new light source with a light beam steering mechanism is proposed for Optical MEMS. The propose device is composed of GaN light source and a movable stage. The direction of the light beam emitted from the GaN light source can be changed by the stage with the comb drive actuators. We deposited the GaN films on Si substrate by molecular beam epitaxy (MBE) and fabricated a movable stage by Si micromachining. The displacement of the Si stage was measured to be 50 um at the voltage of 100V and photoluminescence (PL) from the GaN light source was observed while moving the stage.

AB - A new light source with a light beam steering mechanism is proposed for Optical MEMS. The propose device is composed of GaN light source and a movable stage. The direction of the light beam emitted from the GaN light source can be changed by the stage with the comb drive actuators. We deposited the GaN films on Si substrate by molecular beam epitaxy (MBE) and fabricated a movable stage by Si micromachining. The displacement of the Si stage was measured to be 50 um at the voltage of 100V and photoluminescence (PL) from the GaN light source was observed while moving the stage.

UR - http://www.scopus.com/inward/record.url?scp=57449097021&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=57449097021&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:57449097021

SN - 9781605603919

T3 - IDW '07 - Proceedings of the 14th International Display Workshops

SP - 2006

EP - 2008

BT - Society for Information Display - 14th International Display Workshops, IDW '07

T2 - 14th International Display Workshops, IDW '07

Y2 - 5 December 2007 through 5 December 2007

ER -