TY - GEN
T1 - Monolithic fabrication of GaN/Si structure for optical MEMS
AU - Ito, R.
AU - Hu, F. R.
AU - Wakui, M.
AU - Hane, K.
PY - 2007/12/1
Y1 - 2007/12/1
N2 - A new light source with a light beam steering mechanism is proposed for Optical MEMS. The propose device is composed of GaN light source and a movable stage. The direction of the light beam emitted from the GaN light source can be changed by the stage with the comb drive actuators. We deposited the GaN films on Si substrate by molecular beam epitaxy (MBE) and fabricated a movable stage by Si micromachining. The displacement of the Si stage was measured to be 50 um at the voltage of 100V and photoluminescence (PL) from the GaN light source was observed while moving the stage.
AB - A new light source with a light beam steering mechanism is proposed for Optical MEMS. The propose device is composed of GaN light source and a movable stage. The direction of the light beam emitted from the GaN light source can be changed by the stage with the comb drive actuators. We deposited the GaN films on Si substrate by molecular beam epitaxy (MBE) and fabricated a movable stage by Si micromachining. The displacement of the Si stage was measured to be 50 um at the voltage of 100V and photoluminescence (PL) from the GaN light source was observed while moving the stage.
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M3 - Conference contribution
AN - SCOPUS:57449097021
SN - 9781605603919
T3 - IDW '07 - Proceedings of the 14th International Display Workshops
SP - 2006
EP - 2008
BT - Society for Information Display - 14th International Display Workshops, IDW '07
T2 - 14th International Display Workshops, IDW '07
Y2 - 5 December 2007 through 5 December 2007
ER -