Monolithic fabrication of film bulk acoustic resonators above integrated circuit by adhesive-bonding-based film transfer

Abhay Kochhar, Takeshi Matsumura, Guoqiang Zhang, Ramesh Pokharel, Ken Ya Hashimoto, Masayoshi Esashi, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Citations (Scopus)

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Physics & Astronomy