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Monolithic fabrication of film bulk acoustic resonators above integrated circuit by adhesive-bonding-based film transfer
Abhay Kochhar, Takeshi Matsumura, Guoqiang Zhang, Ramesh Pokharel, Ken Ya Hashimoto, Masayoshi Esashi, Shuji Tanaka
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
13
Citations
(Scopus)