Monocrystalline PMNN-PZT thin film ultrasonic rangefinder with 2 meter range at 1 volt drive

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

In this study, we successfully developed a high signal-to-noise ratio (SNR) rangefinder based on a piezoelectric micromachined ultrasonic transducer (pMUT). A monocrystalline Pb(Mn1/3, Nb2/3)O3-Pb(Zr, Ti)O3 (PMnN-PZT) thin film was used because it has large figures-of-merit (FOM) for SNR due to its high piezoelectric coefficient and small relative permittivity (typical values: e31,f = -14 C/m2, ϵr = 200∼300). The rangefinding ability of the monocrystalline PMnN-PZT pMUT was evaluated using a pair of the devices as transmitter and receiver. The maximum range was estimated to be over 2 m at a low actuating voltage of 1 Vp-p, when 12 dB was set as the threshold SNR for reliable rangefinding. The energy consumption of the transmitter was as small as ∼55 pJ for the generation of an ultrasonic burst. This performance is suitable for rangefinding applications in consumer electronics.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages167-170
Number of pages4
ISBN (Electronic)9781538627310
DOIs
Publication statusPublished - 2017 Jul 26
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 2017 Jun 182017 Jun 22

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

Keywords

  • PMnN-PZT
  • pMUT
  • rangefinding

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

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