Monochromator operation in the carbon window region at the reflectometry beamline BL-11D of the Photon Factory

Tadashi Hatano, Shogaku Aihara

    Research output: Contribution to journalConference articlepeer-review

    7 Citations (Scopus)


    The vacuum ultraviolet (VUV) and soft X-ray beamline BL-11D of the Photon Factory has been recently equipped with a reflectometer to be dedicated to reflectometry for optical elements. The monochromator is of a varied deviation angle type. Focus conditions had been achieved using photoelectron spectroscopy data in the separated regions of 60-200 eV and 300-700 eV with respective gratings. Relying on the monochromator parameters, we programmed a monochromator operation optimized to 250-300 eV region for characterization of carbon window multilayers. Spectral reflectance of a Cr/C multilayer was measured at various angles of incidence, and the peak energy changed, showing that the monochromator has a good spectral accuracy as well as a high resolving power. We also programmed a monochromator operation above 700 eV, and the operable energy range has been extended to 200-1000 eV with one grating. The spectral transmittance and reflectances of Co/C multilayers were measured, and the spectral impurities were discussed.

    Original languageEnglish
    Article number152018
    JournalJournal of Physics: Conference Series
    Issue numberPART 15
    Publication statusPublished - 2013
    Event11th International Conference on Synchrotron Radiation Instrumentation, SRI 2012 - Lyon, France
    Duration: 2012 Jul 92012 Jul 13

    ASJC Scopus subject areas

    • Physics and Astronomy(all)


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