The vacuum ultraviolet (VUV) and soft X-ray beamline BL-11D of the Photon Factory has been recently equipped with a reflectometer to be dedicated to reflectometry for optical elements. The monochromator is of a varied deviation angle type. Focus conditions had been achieved using photoelectron spectroscopy data in the separated regions of 60-200 eV and 300-700 eV with respective gratings. Relying on the monochromator parameters, we programmed a monochromator operation optimized to 250-300 eV region for characterization of carbon window multilayers. Spectral reflectance of a Cr/C multilayer was measured at various angles of incidence, and the peak energy changed, showing that the monochromator has a good spectral accuracy as well as a high resolving power. We also programmed a monochromator operation above 700 eV, and the operable energy range has been extended to 200-1000 eV with one grating. The spectral transmittance and reflectances of Co/C multilayers were measured, and the spectral impurities were discussed.
|Journal||Journal of Physics: Conference Series|
|Issue number||PART 15|
|Publication status||Published - 2013|
|Event||11th International Conference on Synchrotron Radiation Instrumentation, SRI 2012 - Lyon, France|
Duration: 2012 Jul 9 → 2012 Jul 13
ASJC Scopus subject areas
- Physics and Astronomy(all)