Monochromatization of characteristic X-rays using stepped X-ray waveguide

Kouichi Hayashi, Katsunori Sakai, Hisataka Takenaka

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


Depending on the X-ray energy, the structure of an X-ray waveguide needs to be varied for greater efficiency. Therefore, a Si/PMMA(polymethyl methacrylate)/Si thin-film structure, whose top Si layer was steplike, was designed as a planar X-ray waveguide on the basis of calculations, and it was fabricated by spin-coating and sputtering. By irradiating white X-rays on two selected areas of a stepped waveguide, the top-layer thicknesses of which were different, W Lβ and Mo Kα lines were effectively guided and monochromatized.

Original languageEnglish
Pages (from-to)5728-5731
Number of pages4
JournalThin Solid Films
Issue number14 SPEC. ISS.
Publication statusPublished - 2007 May 23
Externally publishedYes


  • Organic thin film
  • X-ray reflectivity
  • X-ray waveguide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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