Abstract
Depending on the X-ray energy, the structure of an X-ray waveguide needs to be varied for greater efficiency. Therefore, a Si/PMMA(polymethyl methacrylate)/Si thin-film structure, whose top Si layer was steplike, was designed as a planar X-ray waveguide on the basis of calculations, and it was fabricated by spin-coating and sputtering. By irradiating white X-rays on two selected areas of a stepped waveguide, the top-layer thicknesses of which were different, W Lβ and Mo Kα lines were effectively guided and monochromatized.
Original language | English |
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Pages (from-to) | 5728-5731 |
Number of pages | 4 |
Journal | Thin Solid Films |
Volume | 515 |
Issue number | 14 SPEC. ISS. |
DOIs | |
Publication status | Published - 2007 May 23 |
Externally published | Yes |
Keywords
- Organic thin film
- X-ray reflectivity
- X-ray waveguide
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry