TY - GEN
T1 - Molecular dynamics simulation of form measurement process of soft materials using atomic force microscope
AU - Cai, Yindi
AU - Chen, Yuan Liu
AU - Shimizu, Yuki
AU - Ito, So
AU - Gao, Wei
PY - 2016/11/28
Y1 - 2016/11/28
N2 - Molecular dynamics simulations of contact mode form measurement process on a soft substrate with a special surface profile using a diamond AFM tip are preformed to investigate the contact behavior and the surface profile damages or distortions of the measured substrate. The process of contact mode imaging of the AFM can be treated as the process of nano-scratching. The simulation-predicted interaction force, including scratching force and normal force, characterizes the saw-tooth pattern, which is referred to as atomic stick-slips. The shape of measured substrate surface, especially the surface underneath the AFM tip, is distorted by the interaction force between the AFM tip and the substrate surface.
AB - Molecular dynamics simulations of contact mode form measurement process on a soft substrate with a special surface profile using a diamond AFM tip are preformed to investigate the contact behavior and the surface profile damages or distortions of the measured substrate. The process of contact mode imaging of the AFM can be treated as the process of nano-scratching. The simulation-predicted interaction force, including scratching force and normal force, characterizes the saw-tooth pattern, which is referred to as atomic stick-slips. The shape of measured substrate surface, especially the surface underneath the AFM tip, is distorted by the interaction force between the AFM tip and the substrate surface.
KW - AFM
KW - friction force
KW - molecular dynamics simulations
KW - soft material
KW - surface damages
UR - http://www.scopus.com/inward/record.url?scp=85007157652&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85007157652&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2016.7758221
DO - 10.1109/NEMS.2016.7758221
M3 - Conference contribution
AN - SCOPUS:85007157652
T3 - 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
SP - 156
EP - 159
BT - 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
Y2 - 17 April 2016 through 20 April 2016
ER -