MOLECULAR DESIGN FOR CROSS-LINKING NEGATIVE RESISTS: RELATIONSHIP BETWEEN SENSITIVITY AND COMPONENT RATIO IN COPOLYMER RESISTS.

Katsumi Tanigaki, Yoshitake Ohnishi, Shozo Fujiwara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

The relationship between sensitivity and component ratio in copolymer negative resists was studied theoretically on the basis of Charlesby's gel formation theory. The formulas for sensitivity as a function of component weight ratio are derived for a nonchain reaction and for a chain reaction, respectively. Copolymer sensitivities for any component ratio can be estimated numerically using the derived formulas, from the data on sensitivities for homopolymers composed of individual constituent monomers in the copolymer. The calculated results are in good agreement with the experimental data reported. The derived formulas make it possible to predict copolymer sensitivities and are useful in designing copolymer negative resists.

Original languageEnglish
Title of host publicationACS Symposium Series
PublisherACS
Pages177-189
Number of pages13
ISBN (Print)0841208239
Publication statusPublished - 1984 Dec 1
Externally publishedYes

Publication series

NameACS Symposium Series
ISSN (Print)0097-6156

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)

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