MOLECULAR DESIGN FOR CROSS-LINKING NEGATIVE RESISTS (1) RELATIONSHIP BETWEEN SENSITIVITY AND COMPONENT RATIO IN COPOLYMER RESISTS.

Katsumi Tanigaki, Yoshitake Ohnichi, Shozo Fujiwara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationOrganic Coatings and Applied Polymer Science Proceedings
PublisherACS
Pages179-183
Number of pages5
ISBN (Print)0841207593
Publication statusPublished - 1983 Jan 1
Externally publishedYes

Publication series

NameOrganic Coatings and Applied Polymer Science Proceedings
Volume48

ASJC Scopus subject areas

  • Engineering(all)

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