Moiré displacement measurement technique for a linear encoder

K. Hane, Y. Uchida, S. Hattori

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

The light intensity diffracted from superimposed dual transmission gratings is sensitive to their relative lateral displacement but is also affected by changes in the air gap between them. Averaging the diffracted light intensities obtained in the gap range of a Fourier image distance, the resultant intensity was almost independent of the gap between the two gratings and had a period of half the pitch of the grating for the lateral displacement. This method can be used for a linear encoder in precision machining.

Original languageEnglish
Pages (from-to)89-95
Number of pages7
JournalOptics and Laser Technology
Volume17
Issue number2
DOIs
Publication statusPublished - 1985 Apr
Externally publishedYes

Keywords

  • displacement measurement
  • moiré fringes
  • optics

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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