Modified photo-sensors for grating-image type micro-encoder

Yoshiaki Kanamori, R. Kamata, M. Mitamura, Y. Ito, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


New integration technique for grating-imaging-type encoder is proposed and the sensor for the encoder has been fabricated using Si micromachining technology. The sensor consists of the Si grids and line photodiodes. The light emission through the Si grids and the light detection with the four-phase-shifted line photodiodes make the optical system compact. Moreover, another photodiode array of the M-series arrangement is installed on the same substrate for the zero-point detection.

Original languageEnglish
Pages (from-to)980-986
Number of pages7
JournalMicrosystem Technologies
Issue number8-10
Publication statusPublished - 2005 Aug 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering


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