Moderate temperature and high-speed synthesis of α-Al2O3 films by laser chemical vapor deposition using Nd:YAG laser

Hokuto Kadokura, Akihiko Ito, Teiichi Kimura, Takashi Goto

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Moderate temperature and high-speed synthesis of α-Al<sub>2</sub>O<sub>3</sub> films by laser chemical vapor deposition using Nd:YAG laser'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds