Modeling and experimental analysis on the nonlinearity of single crystal silicon cantilevered microstructures

Yonggang Jiang, Masayoshi Esashi, Takahito Ono

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

Single crystal silicon microcantilevers with different supporting properties are fabricated for nonlinearity analysis. Using a modeling method, the frequency responses of the microcantilevers are fitted and their nonlinearity parameters are calculated. It is found that the nonlinearity parameter decreases by increasing the length of the cantilever. For the cantilever with same length, narrow cantilevers have smaller nonlinearity parameters. Microcantilevers with a "soft" supporting plate are more susceptible to nonlinear behavior, and the nonlinear parameter increases by increasing the length of the "soft" supporting plate.

Original languageEnglish
Pages (from-to)195-196
Number of pages2
JournalIEEJ Transactions on Sensors and Micromachines
Volume131
Issue number5
DOIs
Publication statusPublished - 2011

Keywords

  • Microcantilever
  • Nonlinearity
  • Softening-spring effect

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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