Modeling and experimental analysis on the nonlinearity of single crystal silicon cantilevered microstructures

Yonggang Jiang; Masayoshi Esashi; Takahito Ono

doi:10.1541/ieejsmas.131.195

Modeling and experimental analysis on the nonlinearity of single crystal silicon cantilevered microstructures

Yonggang Jiang, Masayoshi Esashi, Takahito Ono

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Single crystal silicon microcantilevers with different supporting properties are fabricated for nonlinearity analysis. Using a modeling method, the frequency responses of the microcantilevers are fitted and their nonlinearity parameters are calculated. It is found that the nonlinearity parameter decreases by increasing the length of the cantilever. For the cantilever with same length, narrow cantilevers have smaller nonlinearity parameters. Microcantilevers with a "soft" supporting plate are more susceptible to nonlinear behavior, and the nonlinear parameter increases by increasing the length of the "soft" supporting plate.

Original language	English
Pages (from-to)	195-196
Number of pages	2
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	131
Issue number	5
DOIs	https://doi.org/10.1541/ieejsmas.131.195
Publication status	Published - 2011

Keywords

Microcantilever
Nonlinearity
Softening-spring effect

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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AB - Single crystal silicon microcantilevers with different supporting properties are fabricated for nonlinearity analysis. Using a modeling method, the frequency responses of the microcantilevers are fitted and their nonlinearity parameters are calculated. It is found that the nonlinearity parameter decreases by increasing the length of the cantilever. For the cantilever with same length, narrow cantilevers have smaller nonlinearity parameters. Microcantilevers with a "soft" supporting plate are more susceptible to nonlinear behavior, and the nonlinear parameter increases by increasing the length of the "soft" supporting plate.

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KW - Softening-spring effect

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