Modeling and analysis of a scanning electrostatic force microscope for surface profile measurement

Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents the analysis of a prototype scanning electrostatic force microscope (SEFM) system developed for noncontact surface profile measurement. In the SEFM system, with a dual height method, the distance between the probe tip and the sample surface can be accurately obtained through removing the influence of the electric field distribution on the sample surface. Since the electrostatic force is greatly influenced by the capacitance between the probe tip and the sample surface, a new approach for modeling and analysis of the distribution of capacitance between the probe tip with an arbitrary shape and the sample surface with a random topography by using the finite difference method (FDM) is proposed. The electrostatic forces calculated by the FDM method and the conventional sphere-plane model are compared to verify the validity of the FDM method. The frequency shift values measured by experiment are also compared with the simulation results computed by the FDM method. It has been demonstrated that the electrostatic force between arbitrary shapes of the probe tip and the sample surface can be well calculated by the finite difference method.

Original languageEnglish
Title of host publicationEighth International Symposium on Precision Engineering Measurements and Instrumentation
DOIs
Publication statusPublished - 2013
Event8th International Symposium on Precision Engineering Measurements and Instrumentation - Chengdu, China
Duration: 2012 Aug 82012 Aug 11

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8759
ISSN (Print)0277-786X

Other

Other8th International Symposium on Precision Engineering Measurements and Instrumentation
Country/TerritoryChina
CityChengdu
Period12/8/812/8/11

Keywords

  • Finite Difference Method
  • Measurement.
  • Modeling
  • Profile
  • Scanning Electrostatic Force Microscope

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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