Abstract
Effects of preoxidation on the reaction kinetics of oxygen molecules at Si(001) surface have been investigated by real-time ultraviolet photoelectron spectroscopy. A mode transition from decomposition to growth of surface oxides was found to exist at a certain initial oxide coverage, which is kinetically, not energetically, determined. By considering a change of balance between Si adatom and oxygen-monomer fluxes at the perimeter of oxide clusters, this mode transition is quantitatively described as a bifurcation of an autocatalytic-reaction rate equation.
Original language | English |
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Pages (from-to) | 3179-3181 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 77 |
Issue number | 20 |
DOIs | |
Publication status | Published - 2000 Nov 13 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)