Mode-Matched Multi-Ring Disk Resonator Using Single Crystal (100) Silicon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we report two types of novel mode-matched disk resonators consisting of multi rings made by single crystal (100) silicon. One of the resonators compensates the frequency mismatch using a combination of thick ring and multiple thin rings, showing the mode mismatch as small as 43 ppm. The other one uses elliptic shape connection structures, showing the mode-mismatch as small as 61 ppm. Considering the robustness of mode matching against fabrication errors, the crystal orientation error increases the frequency mismatch more significantly in the first design, and the ring width variation causes larger frequency split in the later design.

Original languageEnglish
Title of host publicationINERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728150994
DOIs
Publication statusPublished - 2021 Mar 22
Event8th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2021 - Virtual, Kailua-Kona, United States
Duration: 2021 Mar 222021 Mar 25

Publication series

NameINERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference8th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2021
Country/TerritoryUnited States
CityVirtual, Kailua-Kona
Period21/3/2221/3/25

ASJC Scopus subject areas

  • Control and Optimization
  • Instrumentation

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