Mode-Matched Multi-Ring Disk Resonator Using (100) Single Crystal Silicon

Shihe Wang; Jianlin Chen; Takashiro Tsukamoto; Shuji Tanaka

doi:10.1109/MEMS51670.2022.9699445

Mode-Matched Multi-Ring Disk Resonator Using (100) Single Crystal Silicon

Shihe Wang, Jianlin Chen, Takashiro Tsukamoto, Shuji Tanaka

ENG - Robotics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports a novel mode-matched multi-ring disk resonator made on a (100) single crystal silicon. The anisotropy of the stiffness was compensated by the combination of multiple ring structures and elliptic interconnection structures. The stiffness of the interconnection structure could control the modal stiffness of whole structure. By optimizing the structural parameters, two n = 2 wineglass modes could be degenerated. The experimental results using a device fabricated by standard SOI process successfully demonstrated that the resonant frequencies were 43.807 and 43.746 kHz, which means the as-fabricated frequency mismatch was as small as only 0.14%.

Original language	English
Title of host publication	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Publisher	IEEE Computer Society
Pages	786-789
Number of pages	4
ISBN (Electronic)	9781665409117
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699445
Publication status	Published - 2022
Event	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan Duration: 2022 Jan 9 → 2022 Jan 13

Publication series

Name	IEEE Symposium on Mass Storage Systems and Technologies
Volume	2022-January
ISSN (Print)	2160-1968

Conference

Conference	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/Territory	Japan
City	Tokyo
Period	22/1/9 → 22/1/13

Keywords

(100) single crystal silicon
Mode matching
disk resonator
multi-ring

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/MEMS51670.2022.9699445

Cite this

Wang, S., Chen, J., Tsukamoto, T., & Tanaka, S. (2022). Mode-Matched Multi-Ring Disk Resonator Using (100) Single Crystal Silicon. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 786-789). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE Computer Society. https://doi.org/10.1109/MEMS51670.2022.9699445

Mode-Matched Multi-Ring Disk Resonator Using (100) Single Crystal Silicon. / Wang, Shihe; Chen, Jianlin; Tsukamoto, Takashiro et al.

35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. IEEE Computer Society, 2022. p. 786-789 (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Wang, S, Chen, J, Tsukamoto, T & Tanaka, S 2022, Mode-Matched Multi-Ring Disk Resonator Using (100) Single Crystal Silicon. in 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. IEEE Symposium on Mass Storage Systems and Technologies, vol. 2022-January, IEEE Computer Society, pp. 786-789, 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japan, 22/1/9. https://doi.org/10.1109/MEMS51670.2022.9699445

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title = "Mode-Matched Multi-Ring Disk Resonator Using (100) Single Crystal Silicon",

abstract = "This paper reports a novel mode-matched multi-ring disk resonator made on a (100) single crystal silicon. The anisotropy of the stiffness was compensated by the combination of multiple ring structures and elliptic interconnection structures. The stiffness of the interconnection structure could control the modal stiffness of whole structure. By optimizing the structural parameters, two n = 2 wineglass modes could be degenerated. The experimental results using a device fabricated by standard SOI process successfully demonstrated that the resonant frequencies were 43.807 and 43.746 kHz, which means the as-fabricated frequency mismatch was as small as only 0.14%. ",

keywords = "(100) single crystal silicon, Mode matching, disk resonator, multi-ring",

author = "Shihe Wang and Jianlin Chen and Takashiro Tsukamoto and Shuji Tanaka",

note = "Funding Information: This work is partly supported by a project commissioned by the New Energy and Industrial Technology Development Organization (NEDO), and Graduate Program for Integration of Mechanical Systems (Advanced Graduate School Doctoral Fellowship). Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

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doi = "10.1109/MEMS51670.2022.9699445",

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AU - Chen, Jianlin

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AU - Tanaka, Shuji

N1 - Funding Information: This work is partly supported by a project commissioned by the New Energy and Industrial Technology Development Organization (NEDO), and Graduate Program for Integration of Mechanical Systems (Advanced Graduate School Doctoral Fellowship). Publisher Copyright: © 2022 IEEE.

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Y1 - 2022

N2 - This paper reports a novel mode-matched multi-ring disk resonator made on a (100) single crystal silicon. The anisotropy of the stiffness was compensated by the combination of multiple ring structures and elliptic interconnection structures. The stiffness of the interconnection structure could control the modal stiffness of whole structure. By optimizing the structural parameters, two n = 2 wineglass modes could be degenerated. The experimental results using a device fabricated by standard SOI process successfully demonstrated that the resonant frequencies were 43.807 and 43.746 kHz, which means the as-fabricated frequency mismatch was as small as only 0.14%.

AB - This paper reports a novel mode-matched multi-ring disk resonator made on a (100) single crystal silicon. The anisotropy of the stiffness was compensated by the combination of multiple ring structures and elliptic interconnection structures. The stiffness of the interconnection structure could control the modal stiffness of whole structure. By optimizing the structural parameters, two n = 2 wineglass modes could be degenerated. The experimental results using a device fabricated by standard SOI process successfully demonstrated that the resonant frequencies were 43.807 and 43.746 kHz, which means the as-fabricated frequency mismatch was as small as only 0.14%.

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Mode-Matched Multi-Ring Disk Resonator Using (100) Single Crystal Silicon

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