Mixing effect on a nonequilibrium RF induction plasma

Hideya Nishiyama, Takehiko Sato, S. Ito, Takeshi Sato, S. Kamiyama

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

An experimental study was conducted to clarify the effect of secondary gas mixing on the thermo-fluid characteristics of a nonequilibrium RF induction plasma. The premixed argon and helium gas was introduced into a reactor to produce a RF induction plasma in a low operating pressure. It is shown that there are large effects of helium gas injection location and guide length on the plasma luminous area, operating limit of stable plasma, concentration and temperature fields of a RF induction plasma. A visualization study was also conducted to correspond to the variation of plasma configurations by premixing with helium gas.

Original languageEnglish
Pages (from-to)433-437
Number of pages5
JournalHeat and Mass Transfer/Waerme- und Stoffuebertragung
Volume36
Issue number5
DOIs
Publication statusPublished - 2000 Sep 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Fluid Flow and Transfer Processes

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