Mirror with two parallel rotation axes for external cavity laser

Masahiro Ishimori, Minoru Sasaki, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A mirror device for an external cavity diode laser is fabricated. To achieve a wide and continuous tuning range, mechanical linkage of two parallel rotation axes can rotate and translate the mirror, generating a virtual pivot point of the mirror motion. This mirror device is realized using a wafer-folding technique.

Original languageEnglish
Title of host publicationIEEE/LEOS Optical MEMS 2005
Subtitle of host publicationInternational Conference on Optical MEMS and Their Applications
Pages93-94
Number of pages2
DOIs
Publication statusPublished - 2005 Dec 1
EventIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications - Oulu, Finland
Duration: 2005 Aug 12005 Aug 4

Publication series

NameIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

Other

OtherIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
Country/TerritoryFinland
CityOulu
Period05/8/105/8/4

Keywords

  • Comb drive actuator
  • Mode hop free
  • SOI MEMS
  • Tunable laser

ASJC Scopus subject areas

  • Engineering(all)

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