Mirror with two parallel rotation axes for external cavity laser

Masahiro Ishimori, Minoru Sasaki, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A mirror device for an external cavity diode laser is fabricated. To achieve a wide and continuous tuning range, mechanical linkage of two parallel rotation axes can rotate and translate the mirror, generating a virtual pivot point of the mirror motion. This mirror device is realized using a wafer-folding technique.

Original languageEnglish
Title of host publicationIEEE/LEOS Optical MEMS 2005
Subtitle of host publicationInternational Conference on Optical MEMS and Their Applications
Pages93-94
Number of pages2
DOIs
Publication statusPublished - 2005 Dec 1
EventIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications - Oulu, Finland
Duration: 2005 Aug 12005 Aug 4

Publication series

NameIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

Other

OtherIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
CountryFinland
CityOulu
Period05/8/105/8/4

Keywords

  • Comb drive actuator
  • Mode hop free
  • SOI MEMS
  • Tunable laser

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint Dive into the research topics of 'Mirror with two parallel rotation axes for external cavity laser'. Together they form a unique fingerprint.

  • Cite this

    Ishimori, M., Sasaki, M., & Hane, K. (2005). Mirror with two parallel rotation axes for external cavity laser. In IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications (pp. 93-94). [1540093] (IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications). https://doi.org/10.1109/OMEMS.2005.1540093