Miniaturized, highly sensitive single-chip multichannel quartz-crystal microbalance

Vu Ngoc Hung, Takashi Abe, Phan Ngoc Minh, Masayoshi Esashi

Research output: Contribution to journalArticle

34 Citations (Scopus)

Abstract

A miniaturized highly sensitive single-chip multichannel quartz-crystal microbalance was presented. The fabrication of quartz resonators in a single-chip with the diameters in the range 0.05-1.0 mm and thickness in the range 18-82 μm was presented. Results showed the Q-factor value as high as ∼30000 in case of a 94 MHz resonator whose diameter was 1 mm and the thickness 17.8 μm.

Original languageEnglish
Pages (from-to)5069-5071
Number of pages3
JournalApplied Physics Letters
Volume81
Issue number26
DOIs
Publication statusPublished - 2002 Dec 23

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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