A miniaturized highly sensitive single-chip multichannel quartz-crystal microbalance was presented. The fabrication of quartz resonators in a single-chip with the diameters in the range 0.05-1.0 mm and thickness in the range 18-82 μm was presented. Results showed the Q-factor value as high as ∼30000 in case of a 94 MHz resonator whose diameter was 1 mm and the thickness 17.8 μm.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)