Miniaturized high-frequency carrier-type thin-film magnetic field sensor with high sensitivity

H. Kikuchi, N. Ajiro, M. Yamaguchi, K. I. Arai, M. Takezawa

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

This paper discusses miniaturization and the sensitivity of a high-frequency carrier-type thin-film magnetic field sensor. We examined a lift-off process as fabrication process instead of ion-milling process to obtain an even edge and higher sensitivity when the sensor is miniaturized. Then, we used a thin conductive interlayer to control the domain structure and demonstrated high sensitivity. The sensor dimensions were miniaturized to 3 μm wide, 1 μm thick and 1 mm long. In this instance, an impedance change of 3 Ω against external dc field was obtained. Moreover, a gain of 150 kΩ/T was achieved.

Original languageEnglish
Pages (from-to)2042-2044
Number of pages3
JournalIEEE Transactions on Magnetics
Volume37
Issue number4 I
DOIs
Publication statusPublished - 2001 Jul 1
Event8th Joint Magnetism and Magnetic Materials -International Magnetic Conference- (MMM-Intermag) - San Antonio, TX, United States
Duration: 2001 Jan 72001 Jan 11

Keywords

  • Domain structure
  • High-frequency carrier-type thin-film magnetic field sensor
  • Laminated sensor
  • Lift-off

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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