Miniaturized force sensor with quartz crystal resonator for wide range of measurement

Yu Ching Lin, Ayumi Asakura, Toshio Fukuda, Fumihito Arai

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Abstract

    To achieve high sensitivity, high-speed response, and wide range, a force sensor with quartz crystal resonator, which has the characteristic that the resonance frequency changes by the external force, is fabricated with a simple structure. AT-cut quartz crystal is employed due to its superior temperature and frequency stability. Because it is weak for the quartz crystal to the impact, bend, and tension, an element retention mechanism was designed that safely maintains the quartz crystal resonator for the external force with flat structure. In this study, a novel retention mechanism of the quartz crystal resonator for the flat structure was fabricated and analyzed. The proposed force sensor is flat, small, and sensitive to be applied to several usages such as medical treatment and dynamic contact force detection of human.

    Original languageEnglish
    Title of host publication2007 International Symposium on Micro-NanoMechatronics and Human Science, MHS
    Pages298-303
    Number of pages6
    DOIs
    Publication statusPublished - 2007 Dec 1
    Event2007 International Symposium on Micro-NanoMechatronics and Human Science, MHS - Nagoya, Japan
    Duration: 2007 Nov 112007 Nov 14

    Publication series

    Name2007 International Symposium on Micro-NanoMechatronics and Human Science, MHS

    Other

    Other2007 International Symposium on Micro-NanoMechatronics and Human Science, MHS
    CountryJapan
    CityNagoya
    Period07/11/1107/11/14

    ASJC Scopus subject areas

    • Artificial Intelligence
    • Computer Networks and Communications
    • Human-Computer Interaction
    • Electrical and Electronic Engineering

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