TY - GEN
T1 - Miniaturized force sensor with quartz crystal resonator for wide range of measurement
AU - Lin, Yu Ching
AU - Asakura, Ayumi
AU - Fukuda, Toshio
AU - Arai, Fumihito
PY - 2007
Y1 - 2007
N2 - To achieve high sensitivity, high-speed response, and wide range, a force sensor with quartz crystal resonator, which has the characteristic that the resonance frequency changes by the external force, is fabricated with a simple structure. AT-cut quartz crystal is employed due to its superior temperature and frequency stability. Because it is weak for the quartz crystal to the impact, bend, and tension, an element retention mechanism was designed that safely maintains the quartz crystal resonator for the external force with flat structure. In this study, a novel retention mechanism of the quartz crystal resonator for the flat structure was fabricated and analyzed. The proposed force sensor is flat, small, and sensitive to be applied to several usages such as medical treatment and dynamic contact force detection of human.
AB - To achieve high sensitivity, high-speed response, and wide range, a force sensor with quartz crystal resonator, which has the characteristic that the resonance frequency changes by the external force, is fabricated with a simple structure. AT-cut quartz crystal is employed due to its superior temperature and frequency stability. Because it is weak for the quartz crystal to the impact, bend, and tension, an element retention mechanism was designed that safely maintains the quartz crystal resonator for the external force with flat structure. In this study, a novel retention mechanism of the quartz crystal resonator for the flat structure was fabricated and analyzed. The proposed force sensor is flat, small, and sensitive to be applied to several usages such as medical treatment and dynamic contact force detection of human.
UR - http://www.scopus.com/inward/record.url?scp=50149111111&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=50149111111&partnerID=8YFLogxK
U2 - 10.1109/MHS.2007.4420870
DO - 10.1109/MHS.2007.4420870
M3 - Conference contribution
AN - SCOPUS:50149111111
SN - 9781424418589
T3 - 2007 International Symposium on Micro-NanoMechatronics and Human Science, MHS
SP - 298
EP - 303
BT - 2007 International Symposium on Micro-NanoMechatronics and Human Science, MHS
T2 - 2007 International Symposium on Micro-NanoMechatronics and Human Science, MHS
Y2 - 11 November 2007 through 14 November 2007
ER -