Miniaturized downhole seismic detector using micromachined silicon capacitive accelerometer

Mitsutomo Nishizawa, Hiroaki Niitsuma, Masayoshi Esashi

Research output: Contribution to conferencePaperpeer-review

2 Citations (Scopus)

Abstract

We have developed a miniaturized downhole seismic detector which is containing a silicon micro capacitive accelerometer. This micro accelerometer is wide band and highly sensitive, and has been developed for subsurface seismic measurement by using micro machining technique. The micro sensor is packaged in a miniaturized sonde in order to install it in a borehole. In field experiments seismic waves generated by an airgun were detected with satisfactory performance by our miniaturized downhole seismic detector.

Original languageEnglish
Publication statusPublished - 2000 Jan 1
Event2000 Society of Exploration Geophysicists Annual Meeting, SEG 2000 - Calgary, Canada
Duration: 2000 Aug 62000 Aug 11

Other

Other2000 Society of Exploration Geophysicists Annual Meeting, SEG 2000
CountryCanada
CityCalgary
Period00/8/600/8/11

ASJC Scopus subject areas

  • Geophysics

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