TY - CONF
T1 - Miniaturized downhole seismic detector using micromachined silicon capacitive accelerometer
AU - Nishizawa, Mitsutomo
AU - Niitsuma, Hiroaki
AU - Esashi, Masayoshi
N1 - Funding Information:
This work was performed at the Venture Business Laboratory in Tohoku University. This work was supported by The Japanese M inistry of Education, Science and Culture under Grant-in-aid No.09305068. We express our gratitude to all parties concerned in the cooperation.
Funding Information:
This work was performed at the Venture Business Laboratory in Tohoku University. This work was supported by The Japanese Ministry of Education, Science and Culture under Grant-in-aid No.09305068. We express our gratitude to all parties concerned in the cooperation.
Publisher Copyright:
© SEG 2000. All rights reserved.
PY - 2000
Y1 - 2000
N2 - We have developed a miniaturized downhole seismic detector which is containing a silicon micro capacitive accelerometer. This micro accelerometer is wide band and highly sensitive, and has been developed for subsurface seismic measurement by using micro machining technique. The micro sensor is packaged in a miniaturized sonde in order to install it in a borehole. In field experiments seismic waves generated by an airgun were detected with satisfactory performance by our miniaturized downhole seismic detector.
AB - We have developed a miniaturized downhole seismic detector which is containing a silicon micro capacitive accelerometer. This micro accelerometer is wide band and highly sensitive, and has been developed for subsurface seismic measurement by using micro machining technique. The micro sensor is packaged in a miniaturized sonde in order to install it in a borehole. In field experiments seismic waves generated by an airgun were detected with satisfactory performance by our miniaturized downhole seismic detector.
UR - http://www.scopus.com/inward/record.url?scp=84955573282&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84955573282&partnerID=8YFLogxK
M3 - Paper
AN - SCOPUS:84955573282
T2 - 2000 Society of Exploration Geophysicists Annual Meeting, SEG 2000
Y2 - 6 August 2000 through 11 August 2000
ER -