Miniaturized downhole seismic detector using micromachined silicon capacitive accelerometer

Mitsutomo Nishizawa; Hiroaki Niitsuma; Masayoshi Esashi

Miniaturized downhole seismic detector using micromachined silicon capacitive accelerometer

Mitsutomo Nishizawa, Hiroaki Niitsuma, Masayoshi Esashi

Micro System Integration Center (μSIC)

Research output: Contribution to conference › Paper › peer-review

2 Citations (Scopus)

Abstract

We have developed a miniaturized downhole seismic detector which is containing a silicon micro capacitive accelerometer. This micro accelerometer is wide band and highly sensitive, and has been developed for subsurface seismic measurement by using micro machining technique. The micro sensor is packaged in a miniaturized sonde in order to install it in a borehole. In field experiments seismic waves generated by an airgun were detected with satisfactory performance by our miniaturized downhole seismic detector.

Original language	English
Publication status	Published - 2000 Jan 1
Event	2000 Society of Exploration Geophysicists Annual Meeting, SEG 2000 - Calgary, Canada Duration: 2000 Aug 6 → 2000 Aug 11

Other

Other	2000 Society of Exploration Geophysicists Annual Meeting, SEG 2000
Country	Canada
City	Calgary
Period	00/8/6 → 00/8/11

ASJC Scopus subject areas

Geophysics

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title = "Miniaturized downhole seismic detector using micromachined silicon capacitive accelerometer",

abstract = "We have developed a miniaturized downhole seismic detector which is containing a silicon micro capacitive accelerometer. This micro accelerometer is wide band and highly sensitive, and has been developed for subsurface seismic measurement by using micro machining technique. The micro sensor is packaged in a miniaturized sonde in order to install it in a borehole. In field experiments seismic waves generated by an airgun were detected with satisfactory performance by our miniaturized downhole seismic detector.",

author = "Mitsutomo Nishizawa and Hiroaki Niitsuma and Masayoshi Esashi",

year = "2000",

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note = "2000 Society of Exploration Geophysicists Annual Meeting, SEG 2000 ; Conference date: 06-08-2000 Through 11-08-2000",

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TY - CONF

T1 - Miniaturized downhole seismic detector using micromachined silicon capacitive accelerometer

AU - Nishizawa, Mitsutomo

AU - Niitsuma, Hiroaki

AU - Esashi, Masayoshi

PY - 2000/1/1

Y1 - 2000/1/1

N2 - We have developed a miniaturized downhole seismic detector which is containing a silicon micro capacitive accelerometer. This micro accelerometer is wide band and highly sensitive, and has been developed for subsurface seismic measurement by using micro machining technique. The micro sensor is packaged in a miniaturized sonde in order to install it in a borehole. In field experiments seismic waves generated by an airgun were detected with satisfactory performance by our miniaturized downhole seismic detector.

AB - We have developed a miniaturized downhole seismic detector which is containing a silicon micro capacitive accelerometer. This micro accelerometer is wide band and highly sensitive, and has been developed for subsurface seismic measurement by using micro machining technique. The micro sensor is packaged in a miniaturized sonde in order to install it in a borehole. In field experiments seismic waves generated by an airgun were detected with satisfactory performance by our miniaturized downhole seismic detector.

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M3 - Paper

AN - SCOPUS:84955573282

T2 - 2000 Society of Exploration Geophysicists Annual Meeting, SEG 2000

Y2 - 6 August 2000 through 11 August 2000

ER -