Miniaturized downhole seismic detector using micromachined silicon capacitive accelerometer

Mitsutomo Nishizawa, Hiroaki Niitsuma, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


We have developed a miniaturized downhole seismic detector which is containing a silicon micro capacitive accelerometer. This micro accelerometer is wide band and highly sensitive, and has been developed for subsurface seismic measurement by using micro machining technique. The micro sensor is packaged in a miniaturized sonde in order to install it in a borehole. In field experiments seismic waves generated by an airgun were detected with satisfactory performance by our miniaturized downhole seismic detector.

Original languageEnglish
Pages (from-to)1791-1793
Number of pages3
JournalSEG Technical Program Expanded Abstracts
Issue number1
Publication statusPublished - 2000 Jan 1

ASJC Scopus subject areas

  • Geotechnical Engineering and Engineering Geology
  • Geophysics


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