Miniaturization of surface patterns by combination of contact etching lithography and multi-step shrinking of stretched polymer films

Hiroshi Yabu, Masatsugu Shimomura

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

We demonstrate here a novel pattern transferring method named "Contact Etching Lithography" onto stretched polymer films by using a solvent-swollen polydimethylsiloxane (PDMS) molds as a template. Furthermore, the transferred patterns can be miniaturized by thermal shrinking of the patterned stretched polymer film.

Original languageEnglish
Pages (from-to)534-537
Number of pages4
JournalPolymer Journal
Volume40
Issue number6
DOIs
Publication statusPublished - 2008

Keywords

  • Contact etching lithography
  • Pattern miniaturization
  • Stretched polymer films

ASJC Scopus subject areas

  • Polymers and Plastics
  • Materials Chemistry

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