Miniature wishbone interferometer using rotary comb drive actuator for environment gas monitoring

Young Min Lee, Masaya Toda, Masayoshi Esashi, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

Miniature interferometer with a maximum resolution of approximately 2 cm-1 which consists of the rotary comb drive actuator, three-dimensional corner cube mirrors, beam splitter and capacitive displacement sensor. The total size of the interferometer is approximately 8 × 8 mm2. The displacement of the corner cube mirror has approximately 650 μm when a voltage of 180 V is applied and this displacement observed using capacitive displacement sensor. Hereby, the maximum optical path difference of approximately 2640 μm is achieved. The interferogram of the superluminescent diode light source is successfully detected and its wavenumber of approximately 12000 cm-1 is indentified.

Original languageEnglish
Title of host publication2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages716-719
Number of pages4
DOIs
Publication statusPublished - 2011
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: 2011 Jan 232011 Jan 27

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
CountryMexico
CityCancun
Period11/1/2311/1/27

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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